FEATURES

? Ultralow noise density: 44 μg/√Hz (XY) and 55 μg/√Hz (Z)

? Low power consumption

? High performance: 520 μA

? Ultra-low power: 33 μA

? Wide bandwidth: 8 kHz

? Relative flatness with equalization: <0.5 dB

? Relative flatness without equalization: <3.5 dB

? Low latency: group delay <85 μs

? Digital features

? 16-bit ADC

? Multiprotocol serial interfaces: SPI or I2C

? Multiprotocol audio data output: I2S, TDM, and PDM

? Programmable LPF and HPF

? Data synchronous or asynchronous sampling

? Output FIFO: 320 word

? Built-in features for system-level power savings

? Single tap, double tap, or triple tap detection

? Activity and inactivity detection

? Configurable interrupt modes

? Integrated temperature sensor

? Voltage range options

? VS with internal regulators: 2.25 V to 3.6 V (or V1P8 at 1.8 V)

? VDDIO: 1.14 V to 3.6 V (1.62 V to 3.6 V for full temperature

range)

? Electromechanical self test

? 10,000 g mechanical shock survival

? RoHS compliant

? Operating temperature range: ?40°C to +125°C

? 14-terminal, 2.9 mm × 2.8 mm × 0.87 mm, LGA package

APPLICATIONS

? Condition-based monitoring

? Structural health monitoring

? Seismic imaging

? Robotics

? Audio and active noise cancellation (ANC)

? Wearables and low power motion detection